Combined nanoscale KPFM characterization and device simulation for the evaluation of the MOSFET variability related to metal gate workfunction fluctuations
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چکیده
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ژورنال
عنوان ژورنال: Microelectronic Engineering
سال: 2019
ISSN: 0167-9317
DOI: 10.1016/j.mee.2019.111048